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NO2 Gas Sensor Utilizing Fe2O3 Thin Films Prepared By DC- Magnetron Sputtering Method | ||
| Al-Ma'mon College Journal | ||
| Article 1, Volume 0, Issue 30, 2018, Pages 161-173 | ||
| Authors | ||
| Kassim M. Wadi; Aqeel Nafea Abdulateef | ||
| Abstract | ||
| In our research we investigated and reported the (NO2) gas sensor properties of iron oxide (Fe2O3) thin films prepared via magnetron DC- sputtering with different thicknesses according to various deposition times, each film thickness is tested with different sample temperature (200, 250 and 300) oC in order to enhance gas sensitivity. In the experimental and test procedure parts the preparation and test steps for the sensor were described briefly with simplified figures describing the system. The test was done for all samples under same biasing voltage and gas-air concentration. Sensitivity was calculated using the provided equation. The electrical properties of thin films are also shortly described. The results show that as the film thickness increases the film gas sensitivity increases and for each film thickness, the gas sensitivity increases also as the operating temperature increases | ||
| Keywords | ||
| gas sensor; Sputtering; thin film | ||
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