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Study the Properties of Silicon Nanocrystallites Prepared By Wet Etching | ||
| Engineering and Technology Journal | ||
| Article 1, Volume 28, Issue 2, 2010, Pages 301-306 PDF (326.13 K) | ||
| DOI: 10.30684/etj.28.2.8 | ||
| Author | ||
| Mukkaram A. fakhery | ||
| Abstract | ||
| This work presents the formation of porous silicon by photo-electrochemical processes using diode laser 514 nm, 2mW, under different etching times. The time dependence of porosity values, layer thickness, pore diameter, pore shape ,wall thickness, and etching rate were studied based on SEM images. | ||
| Keywords | ||
| porous silicon; Laser beam; SEMImages | ||
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