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Fractal Nanotechnology (Invited Paper) | ||
| Iraqi Journal of Applied Physics | ||
| Article 1, Volume 4, Issue 4, 2008, Pages 25-29 | ||
| Authors | ||
| G. Ceroflini; D. Narduci; P. Amato; E. Romano | ||
| Abstract | ||
| Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 102–105 nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown that this goal may be achieved via a multiplicative variant of the multi-spacer patterning technology, in this way permitting the controlled preparation of fractal surfaces. | ||
| Keywords | ||
| Spacer technology; Sub; lithographic preparation; Fractals | ||
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