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The Effect of Heat Treatment on Phase Formation of Ti-Al-C thin films | ||
| Engineering and Technology Journal | ||
| Article 1, Volume 30, Issue 19, 2012, Pages 405-419 PDF (766.01 K) | ||
| DOI: 10.30684/etj.30.19.15 | ||
| Author | ||
| Ahmed Mohamed Hasan | ||
| Abstract | ||
| A variety of different chemical compositions Titanium-Aluminum-Carbon thin films were achieved by combinatorial magnetron sputtering. The as-deposited ternary diagram can be divided into two regions. The first region consists of titanium carbide structure with substitutional Aluminum atoms at the Carbon rich side of the diagram. The second region consists of the amorphous phase at the rest of the appearing diagram. At 500°C the amorphous phase transforms to titanium carbide structure with substitutional Aluminum atoms and at 600 and 700°C many ternary phases have been shown by X-ray diffraction at different regions while the Carbon rich side sustains the titanium carbide structure with substitutional Aluminum atoms. This work could be considered as a leading study in the way to produce the ternary ceramics at temperatures below the conventional ranges in powder metallurgy as it had been proved earlier by us. | ||
| Keywords | ||
| Thin films; TiCx; Sputtering | ||
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