- All Journals
- Al-Qadisiyah University
- Basrah University
- Kirkuk University
- Mosul University
- The Iraqi Borad for Medical Specialization
- University of Anbar
- University of Technology
- Al Mustafa University
- Al-Zahraa University for Women
- Alnoor University
- Kunooz University
- Misan University
- Ninevah University
- Tikrit University
- University of Al-Hamdaniya
- University of Kerbala
Influence of grounded electrode area on breakdown current in RF capcitively coupled plasma | ||
| Iraqi Journal of Physics | ||
| Article 1, Volume 10, Issue 17, 2012, Pages 90-97 | ||
| Author | ||
| Moyad A. Ahmad | ||
| Abstract | ||
| The influence of the grounded electrode area on the ignition voltage in capcitively coupled radio frequency discharge at 13.56 MHz in argon gas is studied experimentally. The results indicate a systematic decrease of the breakdown voltage with increasing grounded electrode area for the same pd value. Results show that the secondary ionization coefficient γ increases with the increase of grounded electrode area. Furthermore, results also the discharge current at the breakdown voltage increases almost linearly with the increase of electrode area suggesting an almost constant current density. | ||
| Keywords | ||
| Plasma; argon; discharge; Breakdown | ||
|
Statistics Article View: 61 PDF Download: 26 |
||