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PROFLING OF LITHIUM AND POTASSIUM INTO SILICON | ||
| Al-Mustansiriyah Journal of Science | ||
| Article 1, Volume 17, Issue 1, 2006, Pages 64-72 | ||
| Author | ||
| Ali M. MOUSA | ||
| Abstract | ||
| The profiling of Lithium and Potassium into Silicon doped by electro deposition from molten salts (LiBr,KI) have been studied for various time and deposition current. For samples studied changing the deposition time and current have a significant effect on the conductivity type and sheet resistance variation. This has attributed to high value of solid solubility of Lithium and Potassium in Silicon. Also, surface concentration variation with depth is affected significantly by variation in deposition time, particular for samples with deposition time of 7 mints. A junction was found to be at 156 micron from the surface. For constant deposition current diffusion profiles show two distinguishing regions, one with large diffusivity and the second less diffusion constant | ||
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