K.Abud, I., A-R.Ibraheim, M. (2006). Etching of Silicon Wafers Using SF6 Plasma. , 0(22), 234-248.

Intisar K.Abud; Munther A-R.Ibraheim. "Etching of Silicon Wafers Using SF6 Plasma". , 0, 22, 2006, 234-248.

K.Abud, I., A-R.Ibraheim, M. (2006). 'Etching of Silicon Wafers Using SF6 Plasma', , 0(22), pp. 234-248.

K.Abud, I., A-R.Ibraheim, M. Etching of Silicon Wafers Using SF6 Plasma. , 2006; 0(22): 234-248.