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Folding Photonic Nanostructures | ||
| Iraqi Journal of Applied Physics | ||
| Article 1, Volume 9, Issue 3, 2013, Pages 23-24 | ||
| Author | ||
| D. Gracias | ||
| Abstract | ||
| An electron beam lithography and plasma etching process enables hands-free folding of functional metal-patterned dielectric structures with nanoscale dimensions. | ||
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