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Investigation of the Electron Energy Distribution Function in Capacitively Coupled (13.56 MHz) Radio Frequency Discharge in Dry Air | ||
| Rafidain Journal of Science | ||
| Article 8, Volume 24, Issue 11, 2013, Pages 82-95 PDF (0 K) | ||
| DOI: 10.33899/rjs.2013.80284 | ||
| Authors | ||
| Haitham A. Al-Rawachy; Heba T. Al-Saoor | ||
| Abstract | ||
| In this study, the electron energy distribution function in capacitively coupled radio frequency dry air discharge in three different regions along discharge tube was measured. It was observed that all regions do have Fermi electron energy distribution function which increases in magnitude with increasing the applied power, and decreasing with increasing the internal pressure. This function magnitude reaches its highest value near the powered electrode, while it decreases towards the earthed one. | ||
| Keywords | ||
| Capacitively coupled radio frequency; Electron Energy Distribution Function | ||
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