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Statistical Analysis study different between wet and dry etching | ||
| Diyala Journal For Pure Science | ||
| Article 1, Volume 10, Issue 1, 2014, Pages 60-64 | ||
| Author | ||
| Intessar K.Abd | ||
| Abstract | ||
| In this paper a statistical analysis was studied, the different between wet and dry etching was analysis by using Chi-Square distribution. The statically result show that dry processes have etch rates with anisotropic etching more than wet etching process .These results were agree with published data and researches results | ||
| Keywords | ||
| Wet etching; Dry etching; Statistical Analysis | ||
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