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Fabrication and Characterization of ZnO Gas Sensor | ||
| Engineering and Technology Journal | ||
| Article 16, Volume 32, Issue 9, 2014, Pages 2303-2312 PDF (653.2 K) | ||
| DOI: 10.30684/etj.32.9A16 | ||
| Authors | ||
| Alaa A. Abdul-Hamead; Farhad M. Osman; Alaa S. Taeeh | ||
| Abstract | ||
| In this paper thin films of zinc oxide ZnO was prepared by spray pyrolyess method with thickness were about ( 0.1 ±0.05 µm) on n-type silicon substrates at different deposition temperature (300,400,500) C°, from zinc chloride at concentrations (0.05,0.1) M as a sensor for pollutant gases like CO2 , NO2, and H2S related with oil manufacture . The crystallinity and morphology of the films were characterized by XRD, and optical microscopy was done on prepared films , addition to sensitivity to polluting gases previously mentioned at different test temperature (10-50) C°. Result shows that the crystallization increased by increasing deposition temperature(substrate temperature), and the sensitivity increased by rising both of the gas concentration or temperature. | ||
| Keywords | ||
| ZnO thin film; Gas Sensor; spray pyrolyess; pollutant gases; XRD | ||
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